Bem For The Analysis Of Fluid Flowaround Mems.

Víctor D. Fachinotti, Alberto Cardona, Jorge D’Elía, Stéphane Paquay


The boundary element method (BEM) is used in this work for modelling the fluid flow
around a vibrating micro-electro-mechanical system (MEMS). Device motion induces flow and, therefore,
drag-forces develop on the surface of the MEMS with a damping effect on the MEMS vibration.
We assume that the fluid around MEMS can be treated as a continuum and, further on, that the flow can
be modelled as incompressible with a very low Reynolds number. Under such conditions, met in a large
number of MEMS in practice, the fluid flow can be accurately described by Stokes theory of quasi-steady
incompressible flow. We take into account MEMS deformation effects on fluid flow analysis.
Fast integration is performed using the collocation method. Self-integrals containing singular kernels
are analytically computed over linear triangles.
This model has been computationally implemented into the engineering software OOFELIE:MEMS,
developed by Open Engineering SA.
The accuracy of the model is tested using a benchmark problem – the flow around a sphere moving
with constant velocity–, with satisfactory results. Preliminary results of an application to MEMS are also

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